Scanning Acoustic Microscopes

SONIXTM Inc, USA
Scanning Acoustic Microscopes

SONIX™ Inc, wholly owned subsidiary of the Danaher Corporations (NYSE:DHR), is a leading manufacturer of scanning acoustic microscopes and non-destructive testing equipment. They have been a consistant innovator in non-destructive testing since 1986. Sonix was the leader who brought the PC-based, digital imaging solutions to customers. Since then, they have continued manufacturing the technology envelope and providing superior inspection technologies and engineering advancements to their customers.

SONIX™ systems are used for the non-destructive inspection of a variety of materials including semiconductor packages, automotive parts and other advanced components. Based on proprietary softwares, hardwares and patented innovations, Sonix’s systems have evolved over many years of experience working with customers. Sonix strives to provide the most accurate data, the perfect image quality, exceptional maneuverability and high reliability of the equipment, so as to improve the efficiency and cost effective

SONIX Software Advantages: 　

● Programmable scanning
Automatic analysis of a customized scanning

program.
Automatically complete the analysis, and

generatedata.

● FSF Surface tracking line
Automatically track sample surface to keep same depth of inspection

● ICEBERG Offline Analysis
Analyzing data offline

● TAMI scan
No need to select the exact waveform, can be arbitrarily set the scan depth and desired thickness is
achieved by scanning 200 pictures. The easiest and fastest to complete the analysis.

SONIX Software -
Improved imaging quality for FlipChips & Stacked Die products 　

Sonix Flexible TAMI™ Design

Specially designed for checking complex and multiply material packages, for example:

● 3D Structure
● Stacked Die
● Bonded wafers
● Wafer Level Packaging (WLP)
● Molded Flip Chips

* All new SONIX™ ECHO™ SAM are equipped with Flexible TAMI™ Gates

Sonix Hardware Advantages:

● Compact, stable structured design
Modular design makes it as a simple structure, stable and easy to maintain

● High-speed, stable motor design
The scan axis using the most advanced linear serve motor to provide high-speed, stability, and wear-free
scanning

● Patented transducers / lens
Provide accurate defect inspection, can detect delamine as thin as 0.1 μm.

● PETT Technology
Simultaneously reflection and transmission.

Packaging Inspection 　

ECHO-LS™

Ultra-sound
Scanning Mode

Max. resolution

Max. scan area

Max. serve velocity

Transducer
frequency range

System dimension
　

A-Scan, B-Scan, C-Scan, Multi-scan, Tray-scan,
Jump-scan, HTS, Tami-Scan

10000 x 10000 pix

350mm x 350mm

1000 mm/s, 10000 mm/s2

100 to 300 MHz

31" x 31" x 48" (W x D x H
　

ECHO-VS™

SONIXTM Echo-VS is a new generation of equipment, designed for greater precision, more complex components. It is used in Flip chips, Stacked die, Bumped die, Bonded Wafers.

● High-resolution, scanning speed is 2.5 times the conventional
    ultrasonic scanning microscope
● Unique waveform simulator (Waveform Simulator) and the beam
    simulation (Beam Emulator)
● Scan resolution of less than 1 micron.
● The water temperature control system and ultraviolet disinfection
    system, the signal is more stable

	ECHO Pro™ Fully Automated Scanning Acoustic Microscopes
	● Fully automated JEDEC tray handling SAM solution ● Automated tool is something that would increase productivity and defect detection ● High volume production ● Reduce drying time

Wafer Inspection

AutoWafer Pro™

A flexible, automated tool designed for production, AutoWafer Pro provides fast, high-resolution scanning of 200mm and 300mm bonded wafers. It’s the ideal solution for identifying bond defects in wafer applications such as MEMS, BSI Sensors, CMOS, memory, TSV and LED.

● Fully automated robotics using open cassettes, SMIF Pod, FOUPs or
FOSB handling
● Class 1 clean room compliant, with integrated HEPA filter
● 200mm SECS/GEM & KLARF compatible (optional)
　

Pulse2 Pulser/Receiver for all ECHO and AutoWafer Systems

● +12 dB gain compared to standard pulser/receivers ● 4x improvement in signal-to-noise ratio (SNR) ● Separates signals from low-level background noise in the signal path ● Generates clean, clear images even with ultra-high-frequency transducers

Transducers for ECHO-LS, ECHO VS and ECHO Pro

Sonix S-series transducers are designed in-house to meet the demanding requirements of semiconductor manufacturing.

• Designed in-house.
• Wide frequency range.
• Robust construction.

Flexible Tray Fixture (NEW !!)

Part Number: 600-5100
Platform: ECHO LS, ECHO, ECHO VS
Applications: Strips, Trays, Wafer

Benefits:
• Ease of use - saves time
• Allows for better imaging due to items being scanned being held securely
• Works with trays, strips and wafers
• Fits into existing ECHO platforms
• Patent Pending

Wand Extensions (NEW !!)

Part Number: Med Size (180mm) Kit Part Number: 600-2323A / Full size Kit Part Number: 600-2324A
Platform: ECHO LS, ECHO, ECHO VS
Applications: Wafers, Trays and Strips

Benefits:
• Ease of use - easy to install, saves time
• 2 sizes (180mm and 250mm) to meet most device size needs
• Fits existing ECHO platform
• *Requires the new Sonix larger diameter wands

Wafer Jig (for use with the Flexible Tray Fixture) (NEW !!)

Part Number: 600-5200
Platform: ECHO LS, ECHO, ECHO VS
Applications: 300mm wafers

Benefits:
• Ease of use with Sonix patent pending Flexible Tray Fixture
• Securely holds 300mm wafers for providing best imaging capability
• Works with warped wafers; holds wafers flat
• Fits into existing ECHO platforms